Technical parameters:
1、Measurement mode: MOS, Schottky
2、Sample size: diameter ≤ 200mm, minimum test size for non-standard samples or fragments is 30mm * 30mm
3、Test range for carrier concentration in epitaxial layer: 1E14-5E18 cm-3
4、Hg contact area: 0.018-0.027 cm2
5、 Contact area repeatability: 1 sigma<0.5%